Synthesis of Copper Nanoparticles by Cathode Sputtering in Radio-frequency Plasma

Автор(ы) Zh.T. Nakysbekov1, M.Zh. Buranbayev1, M.B. Aitzhanov1, G.S. Suyundykova1, M.T. Gabdullin1,2
Принадлежность

1Al-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, Kazakhstan

2Kazakh-British Technical University, 59, Tole bi Str., 050000 Almaty, Kazakhstan

Е-mail nakysbekov.zhasulan@gmail.com
Выпуск Том 10, Год 2018, Номер 3
Даты Получено 05.04.2018; опубликовано online 25.06.2018
Ссылка Zh.T. Nakysbekov, M.Zh. Buranbayev, M.B. Aitzhanov, et al., J. Nano- Electron. Phys. 10 No 3, 03010 (2018)
DOI https://doi.org/10.21272/jnep.10(3).03010
PACS Number(s) 81.10.Bk, 61.46. + w
Ключевые слова Copper (7) , Copper nanopowder (2) , Nanoparticles (64) , PVD method, RF plasma, Synthesis (25) , Cathode sputtering.
Аннотация

The paper describes the design features of the synthesis of copper nanoparticles by the cathode sputtering method in radio-frequency plasma. The dependence of the size and number of Cu nanoparticles on the plasma power, sputtering time, gas flow and pressure was studied. Optimal parameters for obtaining copper particles with an extended fractal structure were determined.

Список литературы