Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

Автор(ы) I.V. Sudzhanskaya1, А.I. Poplavsky1, I.Yu Goncharov1, O.V. Glukhov2

1 Belgorod State University, 85, Pobedy Str., 308015 Belgorod, Russia

2 National University of Radioelectronics, 14, Science Boulevard, 61166 Kharkov, Ukraine

Выпуск Том 9, Год 2017, Номер 6
Даты Получено 15.09.2017, опубликовано online – 24.11.2017
Ссылка I.V. Sudzhanskaya, А.I. Poplavsky, I.Yu Goncharov, O.V. Glukhov, J. Nano- Electron. Phys. 9 No 6, 06027 (2017)
DOI 10.21272/jnep.9(6).06027
PACS Number(s) 68.55.aj, 68.37.Ps
Ключевые слова Carbon films, Electrical capacity, Conductivity (34) , Morphology surface.
Аннотация Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed.

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