Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering

Автор(ы) A.Sh. Asvarov1,2, S.Sh. Makhmudov1, A.Kh. Abduev1, A.K. Akhmedov1, M.A. Aliev1, B.A. Bilalov3

1 Institute of Physics, Dagestan Scientific Center, Russian Academy of Sciences, 94, Yaragskogo st., 367003 Makhachkala, Russia

2 Dagestan Scientific Center, Russian Academy of Sciences, Analytical Center for Collective Use, 45, Gadjieva st., 367025 Makhachkala, Russia

3 Dagestan State Technical University, 70, I. Shamil st., 367015 Makhachkala, Russia

Выпуск Том 8, Год 2016, Номер 4
Даты Получено 15.08.2016, в отредактированной форме – 23.11.2016, опубликовано online – 30.11.2016
Ссылка A.Sh. Asvarov, S.Sh. Makhmudov, A.Kh. Abduev, et al., J. Nano- Electron. Phys. 8 No 4(2), 04053 (2016)
DOI 10.21272/jnep.8(4(2)).04053
PACS Number(s) 81.05.Dz, 81.15.Cd
Ключевые слова ZnO (63) , Mg thin film, Magnetron sputtering (14) , Structural parameters (5) , Transmittance (7) , Band gap (27) .
Аннотация This paper reports the growth and characterization of transparent magnesium doped zinc oxide (ZnO:Mg) thin films prepared on glass substrates by dc magnetron sputtering. The effects of the Mg concentrations (0, 1 and 5 at %) and working gas compositions (pure Ar and Ar-O2 mixture) on the structural and optical properties of the ZnO:Mg thin films were investigated. The experiment results showed that the ZnO and ZnO:Mg thin films are polycrystalline with a hexagonal wurtzite structure exhibiting a preferred (002) crystal plane orientation. The results indicated that the crystallinity of ZnO:Mg thin films was significantly affected by both Mg-doping and the woking gas composition. Optical studies revealed that the optical band gap increases with Mg concentration.

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