Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate

Автор(ы) A.P. Kuzmenko1 , A.E. Kuzko1 , Naw Dint1 , Myo Min Than1 , M.B. Dobromyslov2 , S.G. Emelyanov1 , L.M. Chervyakov1
Принадлежность

1 South-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, Russia

2 Pacific National University, 136, Tikhookeanskaya St., 680035 Khabarovsk, Russia

Е-mail
Выпуск Том 7, Год 2015, Номер 4
Даты Получено 02.10.2015, опубликовано online – 24.12.2015
Ссылка A.P. Kuzmenko, A.E. Kuzko, Naw Dint, et al., J. Nano- Electron. Phys. 7 No 4, 04095 (2015)
DOI
PACS Number(s) 62.23.St, 81.40. – z
Ключевые слова Nanostructure (18) , Magnetron method, Ceramic Substrate.
Аннотация The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relationship between amplitude and phase-frequency components of ellipsometric measurements and phase structure transformations has been established. The structural transition in the vicinity of 573 K, has been found.

Список литературы