Small-scale Vacuum System for Deposition of Multilayer Metallic Films“MVU TM – Magna 3M”

Автор(ы) V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, V.P. Raschinsky, A.N. Shpakov, A.V. Shubnikov

JSC “Research Institute of Precision Machine Manufacturing” (JSC NIITM), 10, Panfilovsky Pr., 124460 Zelenograd, Moscow, Russia

Выпуск Том 6, Год 2014, Номер 3
Даты Получено 19.05.2014, опубликовано online – 15.07.2014
Ссылка V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, et al., J. Nano- Electron. Phys. 6 No 3, 03015 (2014)
PACS Number(s) 81.15.Cd, 52.77.Dq, 52.50. – b
Ключевые слова Vacuum system, Magnetron sputtering (14) , Thin film deposition, Multilayer metallic coatings.
Аннотация A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Precision Machine Manufacturing” is described. Its assembly and working conditions are considered. This system was used for magnetron sputtering multilayer metallic films.

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