The Study of Microstructure of III-V Polar on Non-Polar Heterostructures by HRXRD

Автор(ы) Ravi Kumar , Tapas Ganguli, Vijay Chouhan, V.K. Dixit
Принадлежность Raja Ramanna Centre for Advanced Technology, 452013, Indore, India
Выпуск Том 3, Год 2011, Номер 1, Part 1
Даты Received 04 February 2011, in final form 21 March 2011, published online 22 March 2011
Ссылка Ravi Kumar, Tapas Ganguli, Vijay Chouhan, V.K. Dixit, J. Nano- Electron. Phys. 3 No1, 17 (2011)
PACS Number(s) 61.05.cp, 81.05.Ea
Ключевые слова HRXRD (3) , GaAs/Si, Antiphase domains, Microstructure (21) , Mismatched epitaxy.
In this article, we report on the detailed high resolution x-ray diffraction data analysis of three GaAs films deposited by metal organic vapour phase epitaxy on Si substrates. In the GaAs/Si films the effect of anti phase domains is seen by the selective broadening of (002) and (006) reflections. Further as the (006) reflection is a very weak reflection, such films cannot be analyzed by conventional Williamson-Hall plots using (002), (004) and (006) reflections. We find that using (111), (333) and (444) reflections it is possible to use the standard Williamson-Hall analysis and extract parameters related to the microstructure of the films. We have also carried out the analysis to determine the tilt and twist between the mosaic blocks after correcting for the effects of the finite lateral coherence length.

Список литературы