Atomic Force Analysis of Elastic Deformations of CD
| Автор(ы) | A. Kuzmenko1 , A. Kuzko1, D. Timakov1, M. Dobromyslov2 |
| Принадлежность | 1 Southwest State University, 94, 50 Let Oktyabrya Str., 305040 Kursk, Russia 2 Pacific National University, 136, Tihookeanskaya Str., 680035 Khabarovsk, Russia |
| Е-mail | |
| Выпуск | Том 5, Год 2013, Номер 4 |
| Даты | Получено 24.10.2013, опубликовано online – 10.12.2013 |
| Ссылка | A. Kuzmenko, A. Kuzko, D. Timakov, M. Dobromyslov, J. Nano- Electron. Phys. 5 No 4, 04045 (2013) |
| DOI | |
| PACS Number(s) | 62.20.F. – |
| Ключевые слова | Elastic effects, Atomic force microscopy (9) , Nanoindenter, CD (50) , Polycarbonate. |
| Аннотация | The procedure for the determination of elastic parameters according to reference nanometer lithographic marks by atomic force microscopy on samples with up to microscopic sizes is proposed. Analysis of dynamic changes of elastic characteristics that makes it possible to establish the critical rotation velocity of a CD without plastic deformations has been made. |
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Список литературы |
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