Magneto-Ellipsometry Investigations of Multilayer Nanofilms of Fe and Co

Автор(ы) A.T. Morchenko1 , L.V. Panina1 , V.G. Kostishyn1 , N.A. Yudanov1 , S.P. Kurochka1, A.A. Sergienko1, R.D. Piliposyan1, N.N. Krupa2
Принадлежность

1 National University of Science and Technology, MISIS, 4, Leninsky Ave., 119049 Moscow, Russia

2 Institute of magnetism, NASU, 36b, Vernadsky Str., 03142 Kiev, Ukraine

Е-mail dratm@mail.ru
Выпуск Том 5, Год 2013, Номер 4
Даты Получено 05.08.2013, в отредактированной форме – 05.11.2013, опубликовано online – 10.12.2013
Ссылка A.T. Morchenko, L.V. Panina, et al., J. Nano- Electron. Phys. 5 No 4, 04002 (2013)
DOI
PACS Number(s) 07.60.Fs, 75.70. – i, 75.75. – a, 78.20.Ls
Ключевые слова Magneto-ellipsometry, Magnetic nanofilms, Kerr effect (2) , In situ ellipsometry (2) .
Аннотация Spectral ellipsometry technique is demonstrated to be a useful tool for the investigation of optical and magneto-optical parameters of magnetic heterostructures. Ellipsometry parameters ψ, Δ were measured in the range of 350-1000 nm. Solving the inverse problem by a regression method the refractive index and thickness of the layers were deduced. Magneto-optical spectra were detected in the configuration of equatorial Kerr effect which is fully compatible with the ellipsometry measurements. Spectroscopic ellipsometry method of magnetic structure characterisation can be used for in situ monitoring of magnetic film growth in various processes such as magnetron sputtering, electron beam evaporation and ion beam sputtering.

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