Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles

Автор(ы) V.I. Panfilov1, M.A. Pugachevskii2, A.P. Kuzmenko3 , M.B. Dobromyslov4

1 Far Eastern State Transport University, Khabarovsk, Russia

2 Institute of Materials Science, Khabarovsk Scientific Center, FEB RAS, Khabarovsk, Russia

3 Department of Nanotechnology & Engineering Physics, SWSU, Kursk, Russia

4 Pacific National University, Khabarovsk, Russia

Выпуск Том 7, Год 2015, Номер 4
Даты Получено 02.10.2015, опубликовано online – 24.12.2015
Ссылка V.I. Panfilov, M.A. Pugachevskii, A.P. Kuzmenko, M.B. Dobromyslov, J. Nano- Electron. Phys. 7 No 4, 04099 (2015)
PACS Number(s) 61.46.Df, 65.80.-g, 82.60.Qr
Ключевые слова Laser ablation (2) , Nanoparticles (70) , Hafnium dioxide (2) , High-temperature phase.
Аннотация The influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 % are formed on the surface of the substrate at room temperature during the laser ablation with intensity of 1010 W/m2. It is shown that with increasing the substrate temperature the average size of the ablated nanoparticles decreases and the quantitative content of the high-temperature phases is increased up to 70 %.

Список литературы