Structure of TiAlN Reactive Sputtered Coatings

Автор(ы) V.N. Denisov1,2, B.N. Mavrin2, E.A. Vinogradov2, S.N. Polyakov1, A.N. Kirichenko1, K.V. Gogolinsky1, A.S. Useinov1, V.D.  Blank1, V. Godinho3,4, D. Philippon3, A. Fernandez3

1 Technological Institute for Superhard and Novel Carbon Materials, Troitsk, Moscow region, 142190 Russia

2 Institute of Spectroscopy of RAS, Troitsk, Moscow region, Phizicheskaya street 5, 142190 Russia

3 Instituto de Ciencia de Materiales de Sevilla CSIC-US Avenida Americo Vespucio 49, 41092 Sevilla, Spain

4 Université Libre de Bruxelles Faculty of Applied Sciences, Chemicals and Materials Department, Avenue F.D.Roosevelt, 50 (CP165/63) 1050 Brussels, Belgium

Выпуск Том 4, Год 2012, Номер 1
Даты Received 19 November 2011; published online 14 March 2012
Ссылка V.N. Denisov, B.N. Mavrin, E.A. Vinogradov, et al. J. Nano-Electron. Phys. 4 No 1, 01021 (2012)
PACS Number(s) 2.20.F, 62.20 – x, 78.30Ly, 78.30. – j, 61.05.C, 61.05.cp
Ключевые слова Coating (26) , Hardness (9) , Reactive Sputtering, TiAlN, X-Ray Diffraction (18) , Raman Spectroscopy (15) .
Аннотация The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830  850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl  structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas.

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