Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

Author(s) I.V. Sudzhanskaya1, А.I. Poplavsky1, I.Yu Goncharov1, O.V. Glukhov2
Affiliations

1 Belgorod State University, 85, Pobedy Str., 308015 Belgorod, Russia

2 National University of Radioelectronics, 14, Science Boulevard, 61166 Kharkov, Ukraine

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Issue Volume 9, Year 2017, Number 6
Dates Received 15 September 2017; published online 24 November 2017
Citation I.V. Sudzhanskaya, А.I. Poplavsky, I.Yu Goncharov, O.V. Glukhov, J. Nano- Electron. Phys. 9 No 6, 06027 (2017)
DOI 10.21272/jnep.9(6).06027
PACS Number(s) 68.55.aj, 68.37.Ps
Key words Carbon films, Electrical capacity, Conductivity (34) , Morphology surface.
Annotation Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed.

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