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Structure and Properties of Vacuum-arc Coatings of Chromium and Its Nitrides Obtained under the Action of Constant and Pulse High-voltage Bias Potential

Author(s) O.V. Sobol'1, А.А. Postelnyk1 , R.P. Mygushchenko1 , Ubeidulla F. Al-Qawabeha2, Taha A. Tabaza3, Safwan M. Al-Qawabah3, V.F. Gorban4, V.A. Stolbovoy5
Affiliations

1 National Technical University «Kharkiv Polytechnic Institute», 2, Kyrpychov Str., 61002 Kharkiv, Ukraine

2 Tafila Technical University, At-Tafilah, P O Box 179, 66110 Tafila, Jordan

3 Al-Zaytoonah University Queen Alia, 594, Airport Str., 11733 Amman, Jordan

4 Frantsevich Institute for Problems of Materials Science, 3, Krzhizhanovsky Str., 03142 Kyiv-142, Ukraine

5 National Science Center «Kharkov Institute of Physics and Technology», 1, Akademicheskaya Str., 61108 Kharkiv, Ukraine

Е-mail sool@kpi.kharkov.ua
Issue Volume 9, Year 2017, Number 6
Dates Received 28 August 2017; published online 24 November 2017
Citation O.V. Sobol', А.А. Postelnyk, R.P. Mygushchenko, et al., J. Nano- Electron. Phys. 9 No 6, 06024 (2017)
DOI 10.21272/jnep.9(6).06024
PACS Number(s) 64.75.St, 81.07.Bc, 62.25. – g, 61.05.cp, 61.82.Rx
Key words Vacuum arc, Cr (156) , CrN (6) , Pressure (10) , Bias potential, Pulse potential, Phase composition (2) , Structure (90) , Hardness (9) , Friction coefficient.
Annotation To reveal the regularities of structural engineering of vacuum-arc coatings based on chromium and its nitrides, the influence of the main physicotechnological factors (the pressure of the nitrogen atmosphere and the bias potential) in the formation of coatings was studied. It was discovered that during the deposition of chromium coatings the formation of the texture axis [100], as well as the macrodeformation of compression is happening. The supply of a high-voltage negative pulse potential to the substrate increases the mobility of the deposited atoms and leads to relaxation of the compression deformation. As the pressure increases from 210 – 5 Torr to 4.810 – 3 Torr, the phase composition of the coatings changes: Cr (JCPDS 06-0694) → Cr2N(JCPDS 35-0803) → CrN(JCPDS 11-0065). The supply of high-voltage pulses leads to the formation of a texture of crystallites with parallel growth surfaces planes having d ≈ 0.14 nm. The structure obtained by pulsed high-voltage action makes it possible to increase the hardness of the coating to 32 GPa and reduce the friction coefficient to 0.32 in the "chromium nitride-steel" system and to 0.11 in the "chromium nitride-diamond" system. The results obtained are explained from the viewpoint of increasing the mobility of atoms and the formation of cascades of displacements when using an additional high-voltage potential in the pulse form during the deposition of chromium-based coatings.

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