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Mixing on the Boundaries of Layers of Multilayer Nanoperiod Coatings of the TiNх/ZrNх System: Simulation and Experiment

Author(s) O.V. Sobol'1, A.A. Meylekhov1 , R.P. Mygushchenko1 , А.А. Postelnyk1 , Yu.Ye. Sagaidashnikov1, V.A. Stolbovoy2

1 National Technical University «Kharkiv Polytechnic Institute», 2, Kyrpychov Str., 61002 Kharkiv, Ukraine

2 National Science Center «Kharkov Institute of Physics and Technology», 1, Akademicheskaya St., 61108 Kharkiv, Ukraine

Issue Volume 9, Year 2017, Number 6
Dates Received 25 July 2017; published online 24 November 2017
Citation O.V. Sobol', A.A. Meylekhov, R.P. Mygushchenko, et al., J. Nano- Electron. Phys. 9 No 6, 06021 (2017)
DOI 10.21272/jnep.9(6).06021
PACS Number(s) 64.75.St, 81.07.Bc, 62.25. – g, 61.05.cp, 61.82.Rx
Key words Vacuum arc, TiNх/ZrNх, Period, Bias potential, Phase composition (2) , Structure (90) , Stress-strain state, Solid solution (5) , Computer simulation, Hardness (9) .
Annotation It is established that the critical thickness of radiation-stimulated defect formation has a significant effect on the stress-strain state and hardness of coatings with a small Λ ≈ 10 nm. In this case, relaxation of the stress-strain compression state occurs and the hardness decreases. However, the formation of a solid solution, while retaining part of the unreacted layer of titanium nitride at Λ = 10 nm, makes it possible to obtain an ultrahigh (44.8 GPa) hardness of the coating.