Regularity of Formation of Vacuum-arc Nitride Coating Based on Multi-component Alloys

Author(s) V.M. Beresnev1 , Yu.M. Shabelnyk2, N.I. Shumakova2 , U.S. Nyemchenko1 , S.А. Klymenko3, А.S. Manokhin3
Affiliations

1 1 V.N. Karazin Kharkiv National University, 4, Svobody Sq., 61022, Kharkiv, Ukraine

2 Sumy State University, 2 Rimskyi-Korsakov Str., 40007 Sumy, Ukraine

3 V.N. Bakul Institute for Superhard Materials of NAS of Ukraine, 2, Avtozavodskastr Str., 04074 Kyiv, Ukraine

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Issue Volume 9, Year 2017, Number 4
Dates Received 21 February 2017; revised manuscript received 25 July 2017; published online 27 July 2017
Citation V.M. Beresnev, Yu.M. Shabelnyk, N.I. Shumakova, et al., J. Nano- Electron. Phys. 9 No 4, 04023 (2017)
DOI 10.21272/jnep.9(4).04023
PACS Number(s) 61.46. – w, 62.20.Qp, 62-65. – g
Key words Nitride coatings, Multi-component alloys, Pressure (10) , Nitrogen content, Structure (90) , Hardness (9) .
Annotation The physical factors, which influence on structural state and phase composition of nitride coatings based on multicomponent alloys obtained by means of vacuum-arc deposition method have been determined. It was shown that the increase in partial pressure of nitrogen ensures the formation of a single phase solid solution with fcc crystal lattice. Under the pressure of nitrogen atmosphere below 10 – 3 Pa, a single phase solid solution with a bcclattice is formed; and within the pressure of nitrogen PN = 10 – 3 -8 × 10 – 2 Pa, a two-phase system of solid solutions with bcc and fcc lattices is observed. With an offset potential of – 70 V, a texture [100] is observed; and within the alteration of bias potential of (– 70 V - – 90 V) texture [100] + [111] appears. In the range of Ub from – 120 V to – 150 V, a texture [111] is observed, and, with an increase of bias potential, a texture [111] + [110] is observed.

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