Structural Engineering of the Multilayer Vacuum Arc Nitride Coatings Based on Ti, Cr, Mo and Zr

Author(s) O.V. Sobol’1, A.A. Postelnyk1 , A.A. Meylekhov1 , A.A. Andreev2 , V.A. Stolbovoy2 , V.F. Gorban3

1 National Technical University “Kharkiv Polytechnic Institute”, 2, Kirpichev Str., 61002 Kharkiv, Ukraine

2 National Science Center “Kharkiv Institute of Physics and Technology”, 1, Academic Str., 61108 Kharkiv, Ukraine

3 I.N. Frantsevych Institute for Problems in Materials Science, 3, Krzyzanowski, Str., 03142 Kyiv, Ukraine

Issue Volume 9, Year 2017, Number 3
Dates Received 13 March 2017; published online 30 June 2017
Citation O.V. Sobol’, A.A. Postelnyk, A.A. Meylekhov, J. Nano- Electron. Phys. 9 No 3, 03003 (2017)
DOI 10.21272/jnep.9(3).03003
PACS Number(s) 64.75.St, 81.07.Bc, 62.25. – g, 61.05.cp, 61.82.Rx
Key words Vacuum-arc method, Multiperiod coatings, Structural Engineering, Stress state, Hardness (9) , Strength (4) .
Annotation The possibilities of structural engineering of multi-period vacuum-arc coatings based on nitrides of transition metals Ti, Cr, Mo, and Zr have been investigated by structural studies (X-ray diffraction and electron microscopy) in combination with measurement of hardness by indentation. The formation of phases with a cubic crystal lattice under nonequilibrium conditions under vacuum arc method of production. The supply of a negative bias potential of – 200V in mononitrides leads to the predominant formation of texture of crystallites with the [111] axis. The introduction of thin (about 10 nm) metal layers leads to a decrease in texture perfection [111] and texture formation [100]. This effect is associated with a change in the stress-strain state of nitride layers. It is determined that the composite multiperiod coatings (Me1N/Me2N)/(Me1/Me2) have a greater hardness and greater resistance compared to MeN/Me. For a multi-period system with damping metal layers – (ZrN/CrN)/(Zr/Cr), superhard coatings with a hardness of 46 GPa were obtained.