Small-scale Vacuum System for Deposition of Multilayer Metallic Films“MVU TM – Magna 3M”
| Authors | V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, V.P. Raschinsky, A.N. Shpakov, A.V. Shubnikov |
| Affiliations | JSC “Research Institute of Precision Machine Manufacturing” (JSC NIITM), 10, Panfilovsky Pr., 124460 Zelenograd, Moscow, Russia |
| Е-mail | |
| Issue | Volume 6, Year 2014, Number 3 |
| Dates | Received 19 May 2014; published online 15 July 2014 |
| Citation | V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, et al., J. Nano- Electron. Phys. 6 No 3, 03015 (2014) |
| DOI | |
| PACS Number(s) | 81.15.Cd, 52.77.Dq, 52.50. – b |
| Keywords | Vacuum system, Magnetron sputtering (14) , Thin film deposition, Multilayer metallic coatings. |
| Annotation | A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Precision Machine Manufacturing” is described. Its assembly and working conditions are considered. This system was used for magnetron sputtering multilayer metallic films. |
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List of References |
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